This paper describes the University of Illinois machining system research program. This program focuses on the development of mechanistic models for machining process simulation and the use of these ...

Novel semiconductor technologies are creating complex process flows, which are needed to support the manufacturing of advanced 3D semiconductor structures. It can be helpful to model process flows, ...

The findings of a comparative analysis of linear and nonlinear evaluation process models using 3 (number of models) x 3 (levels of number of attributes) x 2 (levels of "acceptability" of alternatives) ...